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High resolution depth profiling of oxygen and carbon in materials by spectral deconvolution

โœ Scribed by R.L. Schulte


Publisher
Elsevier Science
Year
1976
Weight
419 KB
Volume
137
Category
Article
ISSN
0029-554X

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Depth profiles have been made for a new batch of the certified reference material, BCR 261, of ~30 nm and 100 nm of anodic tantalum pentoxide layers on tantalum foil. Atomic force microscopy studies show that the preparation method traditionally used provides an excellent substrate root-mean-square