The influence of Ar pressure on depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling has been examined through the use of 358 nm thick anodic alumina films grown over flat aluminium surfaces. The films are ideal standards for the present purpose, being amorpho
Recent progress in high resolution depth profiling and interface analysis of thin films
β Scribed by H Oechsner
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 677 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0042-207X
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Degradation of depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling analysis of thin films, formed on relatively rough substrates, has been investigated using preconditioned aluminium substrates of controlled surface roughness. The anodic alumina films, ~120 n
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