Evaluation of a Chip-Based Thin-Film / T
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Michaelβ
J. SchΓΆning; Anette Simonis; Thomas Krings; Hans LΓΌth; Joseph Wang
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Article
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2002
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John Wiley and Sons
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English
β 424 KB
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Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO 2 /Al 2 O 3 and is p