Ablation dynamics of silicon based targets in oxygen and nitrogen atmospheres
✍ Scribed by W. Marine; V. Tokarev; M. Gerri; M. Sentis; E. Fogarassy
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 520 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0040-6090
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The electrical activity of nitrogen±oxygen (N±O) complexes in nitrogen-doped Czochralski (NCZ) silicon treated by hydrogen plasma was investigated. It was observed that in the hydrogenated NCZ samples the absorption line intensity of m-N±O (N±O complexes inducing middle infrared absorption lines) de
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