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A transient SPICE model for dielectric-charging effects in RF MEMS capacitive switches

✍ Scribed by Xiaobin Yuan; Zhen Peng; Hwang, J.C.M.; Forehand, D.; Goldsmith, C.L.

Book ID
114618436
Publisher
IEEE
Year
2006
Tongue
English
Weight
297 KB
Volume
53
Category
Article
ISSN
0018-9383

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf