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Compact RF Model for Transient Characteristics of MEMS Capacitive Switches

✍ Scribed by Halder, S.; Palego, C.; Zhen Peng; Hwang, J.C.M.; Forehand, D.I.; Goldsmith, C.L.

Book ID
114660953
Publisher
IEEE
Year
2009
Tongue
English
Weight
640 KB
Volume
57
Category
Article
ISSN
0018-9480

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πŸ“œ SIMILAR VOLUMES

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf