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Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

✍ Scribed by Belarni, A.; Lamhamdi, M.; Pons, P.; Boudou, L.; Guastavino, J.; Segui, Y.; Papaioannou, G.; Plana, R.

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 680 KB
Volume: 48
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2008.07.046

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