Charging in Dielectricless Capacitive RF-MEMS Switches
β Scribed by Mardivirin, D.; Pothier, A.; Crunteanu, A.; Vialle, B.; Blondy, P.
- Book ID
- 114660948
- Publisher
- IEEE
- Year
- 2009
- Tongue
- English
- Weight
- 1011 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0018-9480
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## Abstract A unified, macroscopic, oneβdimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf
A unified, macroscopic, one-dimensional model is presented for the quantitative description of the process of dielectric charging in radio frequency micro-electromechanical systems (RF MEMS) switches. The fidelity of the model relies on the utilization of experimentally obtained data to assign value