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Structure dependent charging process in RF MEMS capacitive switches

✍ Scribed by E. Papandreou; M. Lamhamdi; C.M. Skoulikidou; P. Pons; G. Papaioannou; R. Plana

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
302 KB
Volume
47
Category
Article
ISSN
0026-2714

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A unified, macroscopic, one-dimensional model is presented for the quantitative description of the process of dielectric charging in radio frequency micro-electromechanical systems (RF MEMS) switches. The fidelity of the model relies on the utilization of experimentally obtained data to assign value