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Charging-Effects in RF capacitive switches influence of insulating layers composition

✍ Scribed by M. Lamhamdi; J. Guastavino; L. Boudou; Y. Segui; P. Pons; L. Bouscayrol; R. Plana

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
523 KB
Volume
46
Category
Article
ISSN
0026-2714

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Modeling of dielectric charging in RF ME
Modeling of dielectric charging in RF MEMS capacitive switches
✍ Prasad S. Sumant; Andreas C. Cangellaris; Narayana R. Aluru πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 242 KB

## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf