𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A Thermally Actuated Microelectromechanical (MEMS) Device For Measuring Viscosity

✍ Scribed by Puchades, Ivan; Fuller, Lynn F.

Book ID
120564149
Publisher
IEEE
Year
2011
Tongue
English
Weight
375 KB
Volume
20
Category
Article
ISSN
1057-7157

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Design and simulation of a thermally act
Design and simulation of a thermally actuated MEMS switch for microwave circuits
✍ Shumin Zhang; Wansheng Su; Mona Zaghloul πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 455 KB

The design, modeling, and optimization of a novel, thermally actuated CMOS-MEMS switch are presented in this article. This series capacitive MEMS switch solves the substrate loss and down-state capacitance degradation problems commonly plaguing MEMS switches. The switch uses finger structure for cap