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A methodology for accelerated testing by mechanical actuation of MEMS devices

✍ Scribed by Michael McMahon; Jeff Jones

Book ID: 116748862
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 672 KB
Volume: 52
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2012.02.007

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