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A novel external electrode configuration for the electrostatic actuation of MEMS based devices

✍ Scribed by Rosa, Michel A; Bruyker, Dirk De; Völkel, Armin R; Peeters, Eric; Dunec, John

Book ID
125519248
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
405 KB
Volume
14
Category
Article
ISSN
0960-1317

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