Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices

✍ Scribed by T. Hantschel; T. Trenkler; W. Vandervorst; A. Malavé; D. Büchel; W. Kulisch; E. Oesterschulze

• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 851 KB
• Volume: 46
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(99)00028-3

✦ Synopsis

dICRO~¢

A novel tip configuration for atomic force microscopy (AFM) called tip-on-tip is presented. In this concept a sharp, very small tip is created on top of a large truncated pyramid. The process scheme for the fabrication of tip-on-tip is presented. It is demonstrated that very sharp metal tips can be produced in this way. Advantages of tip-on-tip when applied in semiconductor device analysis are discussed. First results concerning the transfer of the developed technology to diamond are presented.