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Raman spectroscopy characterization of a thermal bimorph actuator used in a bio-MEMS device

✍ Scribed by Maggiolino, S.; Antoniolli, F.; Pezzotti, G.; Sbaizero, O.

Book ID: 120488206
Publisher: Springer-Verlag
Year: 2012
Tongue: English
Weight: 840 KB
Volume: 19
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-012-1699-2

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