✦ LIBER ✦
Characterization of Microscale Wear in a Polysilicon-Based MEMS Device Using AFM and PEEM–NEXAFS Spectromicroscopy
✍ Scribed by D. S. Grierson; A. R. Konicek; G. E. Wabiszewski; A. V. Sumant; M. P. de Boer; A. D. Corwin; R. W. Carpick
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 360 KB
- Volume
- 36
- Category
- Article
- ISSN
- 1023-8883
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