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Characterization of SiC in DLC/a-Si films prepared by pulsed filtered cathodic arc using Raman spectroscopy and XPS
✍ Scribed by C. Srisang; P. Asanithi; K. Siangchaew; A. Pokaipisit; P. Limsuwan
- Book ID
- 119192522
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 777 KB
- Volume
- 258
- Category
- Article
- ISSN
- 0169-4332
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