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Design and simulation of a novel electro-thermally actuated lateral RF MEMS latching switch for low power applications

✍ Scribed by Pirmoradi, Elham; Mirzajani, Hadi; Badri Ghavifekr, Habib


Book ID
125349110
Publisher
Springer-Verlag
Year
2014
Tongue
English
Weight
882 KB
Volume
21
Category
Article
ISSN
0946-7076

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✍ Shumin Zhang; Wansheng Su; Mona Zaghloul πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 455 KB

The design, modeling, and optimization of a novel, thermally actuated CMOS-MEMS switch are presented in this article. This series capacitive MEMS switch solves the substrate loss and down-state capacitance degradation problems commonly plaguing MEMS switches. The switch uses finger structure for cap