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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Design and implementation of a novel “polymer joint” for thermal actuator current and thermal isolation

✍ Scribed by Lee, Chih-Chun; Chen, Wen-Chih; Lee, Sz-Yuan; Fang, Weileun

Book ID: 121318280
Publisher: IEEE
Year: 2010
Weight: 724 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442543

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