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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Thermogravimetric device with integrated thermal actuators

✍ Scribed by Iervolino, E.; van Herwaarden, A.W.; van der Vlist, W.; Sarro, P.M.

Book ID: 121332649
Publisher: IEEE
Year: 2010
Weight: 973 KB
Volume: 3
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442316

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