𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Scaling of folded electrothermal actuators

✍ Scribed by Gilgunn, Peter J.; Fedder, Gary K.

Book ID: 121344015
Publisher: IEEE
Year: 2010
Weight: 616 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442415

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Ferro-paper actuators

✍ Ding, Zhenwen; Wei, Pinghung; Ziaie, Babak 📂 Article 📅 2010 🏛 IEEE ⚖ 972 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Parylene stiction

✍ Yu, Feiqiao; Lin, Jeffrey Chun-Hui; Chen, Po-Jui; Tai, Yu-Chong 📂 Article 📅 2010 🏛 IEEE ⚖ 603 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Navigation grade MEMS accelerometer

✍ Zwahlen, Pascal; Nguyen, Anne-Marie; Dong, Yufeng; Rudolf, Felix; Pastre, Marc; 📂 Article 📅 2010 🏛 IEEE ⚖ 369 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Electrostatically driven micro-hydraulic actuator arrays

✍ Sadeghi, Mahdi; Kim, Hanseup; Najafi, Khalil 📂 Article 📅 2010 🏛 IEEE ⚖ 860 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Thermogravimetric device with integrated thermal actuators

✍ Iervolino, E.; van Herwaarden, A.W.; van der Vlist, W.; Sarro, P.M. 📂 Article 📅 2010 🏛 IEEE ⚖ 973 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - MEMS energy harvester for wireless biosensors

✍ He, Cairan; Kiziroglou, Michail E.; Yates, David C.; Yeatman, Eric M. 📂 Article 📅 2010 🏛 IEEE ⚖ 653 KB