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A study on the performance of metal-oxide-semiconductor-field-effect-transistors with asymmetric junction doping structure

✍ Scribed by Hyunho Park; Byoungdeog Choi


Book ID
116337628
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
746 KB
Volume
12
Category
Article
ISSN
1567-1739

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Experimental study on isolation edge eff
✍ Toshiyuki Oishi; Katsuomi Shiozawa; Akihiko Furukawa; Yuji Abe; Yasunori Tokuda; πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 265 KB

We investigate experimentally the isolation edge shape effects on the short channel characteristics, i.e. the gate length dependence, of metal oxide semiconductor field effect transistors (MOSFETs) for various isolation structures, as compared with a reference MOSFET without influence of the isolati