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A study of the leakage current in TiN/HfO2/TiN capacitors

✍ Scribed by S. Cimino; A. Padovani; L. Larcher; V.V. Afanas’ev; H.J. Hwang; Y.G. Lee; M. Jurczac; D. Wouters; B.H. Lee; H. Hwang; L. Pantisano


Book ID
113797751
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
441 KB
Volume
95
Category
Article
ISSN
0167-9317

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