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A study of the electrical and interfacial properties of sputtered Ti/Si and sputtered TiSi2/Si Schottky barriers

✍ Scribed by W. De Bosscher; R.L. Van Meirhaeghe; A. De Laere; W.H. Laflère; F. Cardon


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
621 KB
Volume
31
Category
Article
ISSN
0038-1101

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