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On the electrical resistivity and chemical etching of TiSi2 thin films sputtered from a composite target

โœ Scribed by R.K. Nahar; N.M. Devashrayee; W.S. Khokle; P.J. George


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
460 KB
Volume
30
Category
Article
ISSN
0026-2714

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