The influence of sputtering and transport mechanisms on target etching and thin-film growth in r.f. systems, Parts 1 and 2 : L. Holland and C. R. D. Priestland. Vacuum22, No. 4 (1972), pp. 133, 143

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 119 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90096-0