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Application of ion sputtering and etching in the fabrication of PtSi-Si Schottky barrier and ohmic contacts

✍ Scribed by D. Brzezinska; O. Ikanowicz; W. Jung

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 44 KB
Volume: 36
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(76)90037-7

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