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A study of defects induced in GaAs by plasma etching

✍ Scribed by L. He; W.A. Anderson

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 578 KB
Volume: 35
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(92)90054-g

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