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Modification of GaAs surface stoichiometry and reactivity induced by a hydrogen plasma

✍ Scribed by C. Debiemme-Chouvy; D. Ballutaud; J.C. Pesant; C. Severac; A. Etcheberry

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
271 KB
Volume
65-66
Category
Article
ISSN
0169-4332

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