✦ LIBER ✦
A study of defects induced in GaAs by plasma etching : L. He and W. A. Anderson. Solid-St. Electron. 35, 151 (1992)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 134 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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