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A study of Ar implantation induced defects in SiO2

✍ Scribed by R.A.B. Devine; F. Ferrieu; A. Golanski

Publisher: Elsevier Science
Year: 1983
Weight: 419 KB
Volume: 209-210
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(83)90939-0

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