A photoluminescence study of zinc-implanted silicon
β Scribed by M.O. Henry; J.D. Campion; K.G. McGuigan; M.L.W. Thewalt; E.C. Lightowlers
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 286 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0921-5107
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β¦ Synopsis
We report the results" of photoluminescence (PL) measurements on zinc-implanted silicon with a boron concentration of about 1014 cm 3. Annealing in the range 600-800 Β°C produces new luminescence spectra, consisting of a group of broad lines in the range 800-1000 meV and two vibronic bands" labelled Zn ~ and Znt~ with principal zerophonon lines at 1129.82+_0.05 meV and 1090.68++_0.05 meV, respectively. Neither of the two main lines shift or split in magnetic fields of up to 4 Tesla. Decay time measurements at 4.2 K yield values of 1 ms and 1.4 ms for the Zn A and Zn B lines, respectively. The temperature dependence of the luminescence intensities and decay times are typical of isoelectronic bound exciton (IBE) recombination. The energy level structures are similar to those observed for indium-and thallium-doped silicon, and the data add to the evidence that deep acceptors produce a distinctive family of lBE spectra in silicon.
π SIMILAR VOLUMES
Erbium-implanted silicon layers have been studied both by secondary ion mass spectrometry tSIMS) and by photoluminescence (PL). 7he SIMS analysis shows the erbium redistribution inside the substrate following the rapid thermal annealing and the implantation energy. The PL .spectra present a maximum