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A new miniaturized surface micromachined tunneling accelerometer

โœ Scribed by Kubena, R.L.; Atkinson, G.M.; Robinson, W.P.; Stratton, F.P.

Book ID
120258176
Publisher
IEEE
Year
1996
Tongue
English
Weight
492 KB
Volume
17
Category
Article
ISSN
0741-3106

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Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerom