A miniature, high-sensitivity, electron
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Howard K Rockstad; T.K Tang; J.K Reynolds; T.W Kenny; W.J Kaiser; Thomas B Gabri
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Article
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1996
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Elsevier Science
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English
โ 499 KB
Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerom