𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A miniature, high-sensitivity, electron tunneling accelerometer

✍ Scribed by Howard K Rockstad; T.K Tang; J.K Reynolds; T.W Kenny; W.J Kaiser; Thomas B Gabrielson

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
499 KB
Volume
53
Category
Article
ISSN
0924-4247

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✦ Synopsis

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g (Hz) -~/2 or less between 10 and 200 Hz, and close to I 0-8 g (Hz) -~/2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm 3 volume with a mass of 8 g.

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