At the INFN Legnaro Laboratories (Padova, Italy), an ion electron emission microscope dedicated to the study of radiation-induced damage in microelectronic devices has been recently installed. It is used to recognize, with micrometric resolution, the impact point of every single ion into the target.
β¦ LIBER β¦
A high sensitivity imaging detector for electron microscopy
β Scribed by A.R. Faruqi; H.N. Andrews; R. Henderson
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 447 KB
- Volume
- 367
- Category
- Article
- ISSN
- 0168-9002
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