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Design and fabrication of a new miniaturized capacitive accelerometer

✍ Scribed by Liu Shuangfeng; Ma Tiehua; Hou Wen

Book ID: 108262951
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 391 KB
Volume: 147
Category: Article
ISSN: 0924-4247
DOI: 10.1016/j.sna.2008.03.016

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