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Design and fabrication of a Si micromechanical capacitive array for DNA sensing

✍ Scribed by V. Tsouti; S. Chatzandroulis; D. Goustouridis; P. Normand; D. Tsoukalas

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 328 KB
Volume: 85
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.12.075

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