✦ LIBER ✦
Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers
✍ Scribed by Hamed Farahani; James K. Mills; William L. Cleghorn
- Book ID
- 106185770
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 730 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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