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A high-precision, wide-bandwidth micromachined tunneling accelerometer

✍ Scribed by Cheng-Hsien Liu, ; Kenny, T.W.

Book ID: 119951805
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 211 KB
Volume: 10
Category: Article
ISSN: 1057-7157
DOI: 10.1109/84.946800

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