✦ LIBER ✦

High-resolution micromachined interferometric accelerometer

✍ Scribed by Cooper, E. B.; Post, E. R.; Griffith, S.; Levitan, J.; Manalis, S. R.; Schmidt, M. A.; Quate, C. F.

Book ID: 121851015
Publisher: American Institute of Physics
Year: 2000
Tongue: English
Weight: 453 KB
Volume: 76
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.126637

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

High-resolution continuous-time interfac

High-resolution continuous-time interface for micromachined capacitive accelerometer

✍ Lasse Aaltonen; Pasi Rahikkala; Mikko Saukoski; Kari Halonen 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 368 KB

Characterization of a high-sensitivity m

Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution

✍ Cheng-Hsien Liu, ; Barzilai, A.M.; Reynolds, J.K.; Partridge, A.; Kenny, T.W.; G 📂 Article 📅 1998 🏛 IEEE 🌐 English ⚖ 323 KB

A high-precision, wide-bandwidth microma

A high-precision, wide-bandwidth micromachined tunneling accelerometer

✍ Cheng-Hsien Liu, ; Kenny, T.W. 📂 Article 📅 2001 🏛 IEEE 🌐 English ⚖ 211 KB

Higher Order Noise-Shaping Filters for H

Higher Order Noise-Shaping Filters for High-Performance Micromachined Accelerometers

✍ Yufeng Dong; Kraft, M.; Redman-White, W. 📂 Article 📅 2007 🏛 IEEE 🌐 English ⚖ 676 KB

A high-performance micromachined piezore

A high-performance micromachined piezoresistive accelerometer with axially stressed tiny beams

✍ Huang, Shusen; Li, Xinxin; Song, Zhaohui; Wang, Yuelin; Yang, Heng; Che, Lufeng; 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 516 KB

Technology for the high-volume manufactu

Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products

✍ Kevin H.-L. Chau; Robert E. Sulouff Jr. 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 888 KB

Since the inception of silicon surface micromachining more than fifteen years ago, the technology has successfully emerged from academic research and has found practical applications in many high-volume sensor products. The integration of on-chip electronics, in particular, represents the highest le