Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products

✍ Scribed by Kevin H.-L. Chau; Robert E. Sulouff Jr.

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 888 KB
• Volume: 29
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(98)00021-4

✦ Synopsis

Since the inception of silicon surface micromachining more than fifteen years ago, the technology has successfully emerged from academic research and has found practical applications in many high-volume sensor products. The integration of on-chip electronics, in particular, represents the highest level of technological accomplishment to date in surface micromachining technology. The integrated approach offers tremendous performance enhancements while presenting numerous challenges to actual production implementation. This paper uses the Analog Devices accelerometer product series as an example to review the integrated surface micromachining technology and the practical solutions to overcome many of its challenges for high-volume manufacturing.