A high-performance micromachined piezoresistive accelerometer with axially stressed tiny beams

✍ Scribed by Huang, Shusen; Li, Xinxin; Song, Zhaohui; Wang, Yuelin; Yang, Heng; Che, Lufeng; Jiao, Jiwei

• Book ID: 121854300
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 516 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/5/014