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A new cobalt salicide technology for 0.15-μm CMOS devices

✍ Scribed by Inoue, K.; Mikagi, K.; Abiko, H.; Chikaki, S.; Kikkawa, T.


Book ID
114537475
Publisher
IEEE
Year
1998
Tongue
English
Weight
290 KB
Volume
45
Category
Article
ISSN
0018-9383

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