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A multianalytical approach to the characterization of semi-insulating polycrystalline silicon films

✍ Scribed by PG Harris; DC Andrews; AD Trigg; BP Richards; RJW Powell

Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
308 KB
Volume
33
Category
Article
ISSN
0042-207X

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The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background in N(E) vs. E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samp