Use of the Peak-to-background Ratio for Quantitative Auger Analysis of Semi-insulating Polycrystalline Silicon Layers

✍ Scribed by Jozef Liday, Stanislav Tomek, Peter Vogrinčič, Peter Mrázik, Juraj Breza

• Publisher: John Wiley and Sons
• Year: 1996
• Tongue: English
• Weight: 597 KB
• Volume: 24
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199603)24:3<198::aid-sia95>3.0.co;2-4

✦ Synopsis

The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background in N(E) vs. E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samples with a variable content of oxygen. The results obtained were compared with those yielded by other procedures of quantitative AES, and by secondary neutral mass spectrometry.