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The use of peak to background ratio in quantitative Auger analysis

✍ Scribed by J.P. Langeron; L. Minel; J.L. Vignes; S. Bouquet; F. Pellerin; G. Lorang; P. Ailloud; J. Le Héricy

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
219 KB
Volume
49
Category
Article
ISSN
0038-1098

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Use of the Peak-to-background Ratio for Quantitative Auger Analysis of Semi-insulating Polycrystalline Silicon Layers
✍ Jozef Liday, Stanislav Tomek, Peter Vogrinčič, Peter Mrázik, Juraj Breza 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 597 KB

The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background in N(E) vs. E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samp