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A model based reconstruction technique for depth sectioning with scanning transmission electron microscopy

✍ Scribed by W. Van den Broek; S. Van Aert; D. Van Dyck

Book ID
108291800
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
513 KB
Volume
110
Category
Article
ISSN
0304-3991

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## Abstract A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that