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A Micromirror With Large Static Rotation and Vertical Actuation

✍ Scribed by Jin-Chern Chiou; Chin-Fu Kou; Yung-Jiun Lin

Book ID: 114570278
Publisher: IEEE
Year: 2007
Tongue: English
Weight: 661 KB
Volume: 13
Category: Article
ISSN: 1077-260X
DOI: 10.1109/jstqe.2007.892069

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