✦ LIBER ✦
Vertical combdrive based 2-D gimbaled micromirrors with large static rotation by backside island isolation
✍ Scribed by Sunghoon Kwon; Milanovic, V.; Lee, L.P.
- Book ID
- 114569835
- Publisher
- IEEE
- Year
- 2004
- Tongue
- English
- Weight
- 515 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1077-260X
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